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Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited material

✍ Scribed by Reyntjens, S; Puers, R

Book ID: 120823994
Publisher: Institute of Physics
Year: 2000
Tongue: English
Weight: 393 KB
Volume: 10
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/10/2/314

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