✦ LIBER ✦
A predictive divergence compensation approach for the fabrication of three-dimensional microstructures using focused ion beam machining
✍ Scribed by Sun, J.; Luo, X.; Ritchie, J.; Hrncir, T.
- Book ID
- 121432061
- Publisher
- SAGE Publications
- Year
- 2011
- Tongue
- English
- Weight
- 871 KB
- Volume
- 226
- Category
- Article
- ISSN
- 0954-4054
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