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Focused ion beam fabrication of silicon print masters

✍ Scribed by Li, Hong-Wei; Kang, Dae-Joon; Blamire, M G; Huck, Wilhelm T S

Book ID: 121468597
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 332 KB
Volume: 14
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/14/2/323

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