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Focused ion beam doping for GaAs MBE growth

✍ Scribed by Hisao Hashimoto; Akira Takamori; Hiroshi Arimoto; Tetsuo Morita; Eizo Miyauchi

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 661 KB
Volume: 4
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(86)90010-9

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