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Fluorine and hydrogen effects on the growth and transport properties of microcrystalline silicon from SiF4 precursor

✍ Scribed by S. Kasouit; S. Kumar; R. Vanderhaghen; P. Roca i Cabarrocas; I. French

Book ID: 117145649
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 185 KB
Volume: 299-302
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(01)01187-5

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