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Fluctuations in global surface scaling behavior in sputter-deposited ZnO thin films

✍ Scribed by Mohanty, B. C.; Choi, H. R.; Cho, Y. S.

Book ID
125496485
Publisher
EDP Sciences
Year
2011
Tongue
English
Weight
837 KB
Volume
93
Category
Article
ISSN
0295-5075

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Al and N codoped ZnO thin films were grown on n-Si (100) substrate by sputtering technique. Hall effect measurements of as-grown films exhibited n-type conduction, however 500 Β°C Ar annealed codoped films showed p-type conductivity with a hole concentration of 9.9 Γ— 10 16 cm -3 , resistivity of 15.9