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Flow visualization studies for optimization of the growth of TiN by PACVD

โœ Scribed by J. Crummenauer; H.-R. Stock; P. Mayr

Book ID
107930520
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
325 KB
Volume
74-75
Category
Article
ISSN
0257-8972

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โœ Carl R. Shervin; Dean A. Raughley; Raymond A. Romaszewski ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 622 KB

Flow visualization studies have been performed with viscoelastic fluids in three-liter and 21% liter stirred tanks. The objectives were to determine the optimum agitator type, impeller diameter, impeller spacing, agitator speed, and feed location to minimize blend time and prevent formation of dead