✦ LIBER ✦
Optimization of TiN thin film growth with in situ monitoring: the effect of bias voltage and nitrogen flow rate
✍ Scribed by S. Logothetidis; I. Alexandrou; S. Kokkou
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 514 KB
- Volume
- 80
- Category
- Article
- ISSN
- 0257-8972
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