Distributed MEMS transmission lines for
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Yu Liu; Andrea Borgioli; Amit S. Nagra; Robert A. York
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Article
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2001
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John Wiley and Sons
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English
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This paper describes the design and fabrication of a distributed MEMS ( ) transmission line DMTL , used to realize a transmission-line with a voltage-variable electrical length for microwave circuits. The DMTL is a coplanar waveguide periodically loaded with continuously-variable MEMS capacitors. A