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Flame Hydrolysis Deposition of Glass on Silicon for the Integration of Optical and Microfluidic Devices

โœ Scribed by Ruano, Jesus M.; Benoit, Vincent; Aitchison, J. Stewart; Cooper, Jonathan M.

Book ID
120321049
Publisher
American Chemical Society
Year
2000
Tongue
English
Weight
132 KB
Volume
72
Category
Article
ISSN
0003-2700

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โœ J.M. Ruano; D. Ortega; J.R. Bonar; A.J. McLaughlin; M.G. Jubber; J.M. Cooper; J. ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 609 KB

The aim of this study was to develop and optimise a process to etch deep, high aspect ratio microstructures in glasses. To this end, we examined the use of flame hydrolysis deposition (FHD) to form integrated lab-ona-chip structures involving siliea-on-silicon. The PMD process allows buried optical