Characterization of borophosphosilicate glass soot fabricated by flame hydrolysis deposition for silica-on-silicon device applications

✍ Scribed by Choon-Gi Choi; Myung-Yung Jeong; Tae-Goo Choy

• Book ID: 111537043
• Publisher: Springer
• Year: 1999
• Tongue: English
• Weight: 196 KB
• Volume: 34
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1023/a:1004797231932