Finite Difference Analysis of Radial Phosphorus Dopant Distribution in Czochralski-Grown Silicon Single Crystals

✍ Scribed by Sugawara, K.; Ozeki, K.; Fujioka, K.; Mamada, Y.; Igai, M.; Hirayama, H.

• Book ID: 121737844
• Publisher: The Electrochemical Society
• Year: 2001
• Tongue: English
• Weight: 349 KB
• Volume: 148
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.1385821