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Filtering of Defects in Integrated Circuits with Orientation Independence

โœ Scribed by Will, P. M. ;Pennington, K. S.


Book ID
115321872
Publisher
The Optical Society
Year
1971
Tongue
English
Weight
851 KB
Volume
10
Category
Article
ISSN
1559-128X

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Semi-insulating liquid-incapsulated Czochralski GaAs wafers are generally used as substrates for the fabrication of monolithic microwave integrated circuits. In the fabrication process, the wafer is subjected to temperature cycling during the various stages of processing, namely post-ion implantatio