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Film thickness and composition determination for binary alloys using backscattered electrons

โœ Scribed by D.J. Wilson; A.E. Curzon


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
496 KB
Volume
165
Category
Article
ISSN
0040-6090

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The alloy composition and the residual stress in Al x Ga 1--x N on GaN epi-layers can be estimated by measuring both the a-axis and c-axis lattice constants using HRXRD. Using linear elastic theory, we derive the alloy composition of a biaxial strained layer from a simple equation relating the measu