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Film formation technique by ionized-cluster beam

✍ Scribed by T. Takagi; I. Yamada; H. Takaoka

Book ID: 104190506
Publisher: Elsevier Science
Year: 1981
Weight: 105 KB
Volume: 106
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(81)90374-1

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