Filling of nano-via holes by laser-assisted direct imprint

✍ Scribed by Bo Cui; Wei Wu; Chris Keimel; Stephen Y. Chou

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 147 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.087