## Abstract Experimental characterization of the dielectric properties of a SrTiO~3~ (__STO__) thin film in the microwave frequency range at room temperature is presented. The coplanar waveguide linear resonator technique, which is already wellβestablished for thick film characterization, was tailo
Ferroelectric thin-film characterization using a coplanar waveguide bandstop filter
β Scribed by Meng, Qingduan ;Zhang, Xueqiang ;Li, Fei ;Huang, Jiandong ;Zhu, Xiaohong ;Zheng, Dongning ;Cheng, Bolin ;Luo, Qiang ;Gu, Changzhi ;He, Yusheng
- Book ID
- 105363455
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 572 KB
- Volume
- 203
- Category
- Article
- ISSN
- 0031-8965
No coin nor oath required. For personal study only.
β¦ Synopsis
Abstract
A new structure for the characterization of the permittivity of ferroelectric thin films at microwave frequencies is proposed. This new structure involves a coplanar waveguide (CPW) bandstop filter based on a ferroelectric thin film. Using the resonant frequency and Q value of the CPW bandstop filter, the dielectric constant (Ξ΅~r~) and the loss tangent (tan Ξ΄) of the ferroelectric thin film were determined by comparing the measured responses with simulated results. To demonstrate this new structure, a CPW bandstop filter was fabricated on MgO substrate coated with Ba~0.5~Sr~0.5~TiO~3~ (BSTβ0.5). The dielectric parameters determined as a function of temperature and external bias are reported. (Β© 2006 WILEYβVCH Verlag GmbH & Co. KGaA, Weinheim)
π SIMILAR VOLUMES