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Ferroelectric thin-film characterization using a coplanar waveguide bandstop filter

✍ Scribed by Meng, Qingduan ;Zhang, Xueqiang ;Li, Fei ;Huang, Jiandong ;Zhu, Xiaohong ;Zheng, Dongning ;Cheng, Bolin ;Luo, Qiang ;Gu, Changzhi ;He, Yusheng


Book ID
105363455
Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
572 KB
Volume
203
Category
Article
ISSN
0031-8965

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✦ Synopsis


Abstract

A new structure for the characterization of the permittivity of ferroelectric thin films at microwave frequencies is proposed. This new structure involves a coplanar waveguide (CPW) bandstop filter based on a ferroelectric thin film. Using the resonant frequency and Q value of the CPW bandstop filter, the dielectric constant (Ξ΅~r~) and the loss tangent (tan Ξ΄) of the ferroelectric thin film were determined by comparing the measured responses with simulated results. To demonstrate this new structure, a CPW bandstop filter was fabricated on MgO substrate coated with Ba~0.5~Sr~0.5~TiO~3~ (BST‐0.5). The dielectric parameters determined as a function of temperature and external bias are reported. (Β© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)


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## Abstract Experimental characterization of the dielectric properties of a SrTiO~3~ (__STO__) thin film in the microwave frequency range at room temperature is presented. The coplanar waveguide linear resonator technique, which is already well‐established for thick film characterization, was tailo