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Femtosecond laser assisted etching of quartz: microstructuring from inside

✍ Scribed by S. Matsuo; Y. Tabuchi; T. Okada; S. Juodkazis; H. Misawa

Book ID
106020178
Publisher
Springer
Year
2006
Tongue
English
Weight
265 KB
Volume
84
Category
Article
ISSN
1432-0630

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## Abstract Polymers are modified by femtosecond‐(fs)‐IR‐laser irradiation under various process parameters. Several sorts of thermoplastic polymer are employed: polymethylmethacrylate (PMMA), fluorinated PMMA, poly‐__N__‐methyl methacrylimide (PMMI), polystyrol, polycarbonate, polyimide, and polye