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Feedback Control of MEMS to Atoms || In Situ Optical Sensing and State Estimation for Control of Surface Processing

✍ Scribed by Gorman, Jason J.; Shapiro, Benjamin

Book ID: 118001943
Publisher: Springer US
Year: 2011
Weight: 694 KB
Category: Article
ISBN: 1441958320
DOI: 10.1007/978-1-4419-5832-7_3

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