✦ LIBER ✦
In situ UHV contactless C–V and XPS characterization of surface passivation process for InP using a partially nitrided Si interface control layer
✍ Scribed by Hiroshi Takahashi; Hideki Hasegawa
- Book ID
- 108416263
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 262 KB
- Volume
- 166
- Category
- Article
- ISSN
- 0169-4332
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