Fault Detection Using the k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

✍ Scribed by He, Q. Peter; Wang, Jin

• Book ID: 119997588
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 740 KB
• Volume: 20
• Category: Article
• ISSN: 0894-6507
• DOI: 10.1109/TSM.2007.907607