Diffusion maps based k-nearest-neighbor rule technique for semiconductor manufacturing process fault detection

✍ Scribed by Li, Yuan; Zhang, Xinmin

• Book ID: 122302915
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 890 KB
• Volume: 136
• Category: Article
• ISSN: 0169-7439
• DOI: 10.1016/j.chemolab.2014.05.003