Fast Deposition of μc-Si:H by Restrictive Dilution and Enhanced HF-Power

✍ Scribed by Torres, P. ;Keppner, H. ;Meier, J. ;Kroll, U. ;Beck, N. ;Shah, A.

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 136 KB
• Volume: 163
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(199710)163:2<r9::aid-pssa99999>3.0.co;2-7