Facile preparation of sol–gel-derived ultrathin and high-dielectric zirconia films for capacitor devices

✍ Scribed by Hsin-Chiang You; Chun-Ming Chang; Tzeng-Feng Liu; Chih-Chia Cheng; Feng-Chih Chang; Fu-Hsiang Ko

• Book ID: 116245422
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 618 KB
• Volume: 258
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2012.06.079