Facet formation and lateral overgrowth of selective Ge epitaxy on SiO[sub 2]-patterned Si(001) substrates

✍ Scribed by Park, Ji-Soo ;Bai, Jie ;Curtin, Michael ;Carroll, Mark ;Lochtefeld, Anthony

• Book ID: 121818638
• Publisher: AVS (American Vacuum Society)
• Year: 2008
• Tongue: English
• Weight: 453 KB
• Volume: 26
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.2825165