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Fabrication of x-ray masks on a thick substrate for deep x-ray lithography

✍ Scribed by E. V. Petrova; B. G. Gol’denberg; V. I. Kondrat’ev; L. A. Mezentseva; V. F. Pindyurin; A. N. Gentselev; V. S. Eliseev; V. V. Lyakh

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