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Fabrication of via-holes in multi-chip module using third harmonic generation of Nd: YAG laser

✍ Scribed by Eishi Gofuku; Toshio Ohnawa; Mitsuyuki Takada; Fumio Matsukawa; Masahiro Nunoshita

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 976 KB
Volume: 64
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90205-p

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