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Fabrication of uniform nanogrooves on 6H-SiC by femtosecond laser ablation

✍ Scribed by Sung Hoon Kim; Ik-Bu Sohn; Sungho Jeong

Publisher: Springer
Year: 2010
Tongue: English
Weight: 709 KB
Volume: 102
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-010-6077-2

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