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Fabrication of thin-film CuO/ZnO heterojunction and its humidity-sensing properties

โœ Scribed by Yoshijiro Ushio; Masaru Miyayama; Hiroaki Yanagida


Book ID
108028719
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
480 KB
Volume
12
Category
Article
ISSN
0925-4005

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## Abstract An allโ€oxide transparent pโ€“n heterojunction on a glass substrate was fabricated. The structure of the diode was ITO electrode/pโ€CuAlO~2~/nโ€ZnO/In electrode on the glass substrate. The pโ€CuAlO~2~ thin film was deposited by eโ€beam evaporation, which was annealed by the wetโ€oxidation metho