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Fabrication of Superconducting MgB2Thin Films by Magnetron co-Sputtering on (001) MgO Substrates

✍ Scribed by Savio Fabretti, Patrick Thomas…

Book ID
120729040
Publisher
Springer
Year
2012
Tongue
English
Weight
343 KB
Volume
26
Category
Article
ISSN
0896-1107

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Preparation of MgB2 superconducting thin
Preparation of MgB2 superconducting thin films by magnetron sputtering
✍ R. Mičunek; A. Plecenik; P. Kúš; M. Zahoran; M. Tomášek; T. Plecenik; M. Gregor; 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 383 KB

Superconductor MgB 2 thin films with thickness 200 nm were prepared on sapphire substrates by co-deposition of boron and magnesium. Precursor MgB thin films were deposited from two independent magnetron sources-boron by rf magnetron sputtering and magnesium by dc magnetron sputtering. MgB precursor