Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties

✍ Scribed by Gorin, A.; Jaouad, A.; Grondin, E.; Aimez, V.; Charette, P.

• Book ID: 115409723
• Publisher: Optical Society of America
• Year: 2008
• Tongue: English
• Weight: 423 KB
• Volume: 16
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.16.013509