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Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation

✍ Scribed by Wang, X. C.; Zheng, H. Y.; Tan, C. W.; Wang, F.; Yu, H. Y.; Pey, K. L.


Book ID
111985368
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
535 KB
Volume
96
Category
Article
ISSN
0003-6951

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