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Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR

✍ Scribed by Libing Zhou; Fengguang Luo; Mingcui Cao

Book ID: 115367205
Publisher: Optics InfoBase
Year: 2005
Tongue: English
Weight: 275 KB
Volume: 3
Category: Article
ISSN: 1671-7694
DOI: 10.3788/COL20050305.0275

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