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Fabrication of Si nanodot arrays by plasma enhanced CVD using porous alumina templates

โœ Scribed by Hailong Hu; Deyan He

Book ID
113789364
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
353 KB
Volume
60
Category
Article
ISSN
0167-577X

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The Properties of Si1โ€“xGex Nanodot Array
The Properties of Si1โ€“xGex Nanodot Arrays Prepared by Plasma-Enhanced CVD on Porous Alumina Templates
โœ H. Hu; D. He ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 270 KB ๐Ÿ‘ 2 views

Si 1-x Ge x films with nanodot arrays are prepared on anodic aluminum oxide (AAO) templates by plasma-enhanced (PE)CVD. The structure and morphology of the films are investigated using X-ray diffraction (XRD) spectroscopy and transmission electron microscopy (TEM). It is found that the size of the S