Fabrication of short channel MOSFETs with refractory metal gates using RF sputter etching

✍ Scribed by A. Rodriguez; M. Misra; Hj. Hesselbom; P.A. Tove

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 502 KB
• Volume: 19
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(76)90126-x