Fabrication of short channel MOSFETS with refractory metal gates using RF sputter etching : A. Rodriguez, M. Misra, H. Hesselbom and P. A. Tove. Solid State Electronics19. 17 (1976)

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 122 KB
• Volume: 15
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(76)90324-3