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Fabrication of self-assembled monolayer patterns by selective electron beam irradiation and a chemical adsorption technique

✍ Scribed by Norihisa Mino; Shinji Ozaki; Kazufumi Ogawa; Motoyoshi Hatada

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 318 KB
Volume: 243
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)04155-l

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