Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography

✍ Scribed by Bogaerts, W.; Wiaux, V.; Taillaert, D.; Beckx, S.; Luyssaert, B.; Bienstman, P.; Baets, R.

• Book ID: 114569555
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 652 KB
• Volume: 8
• Category: Article
• ISSN: 1077-260X
• DOI: 10.1109/jstqe.2002.800845