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Fabrication of periodic nanostructures by phase-controlled multiple-beam interference

✍ Scribed by Klein-Wiele, Jan-Hendrik; Simon, Peter

Book ID: 111677939
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 577 KB
Volume: 83
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1631746

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