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Fabrication of patterned (311)A GaAs substrates by ArF laser-assisted Cl2 etching

✍ Scribed by Paloma Tejedor; Pablo S. Domínguez

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 505 KB
Volume: 26
Category: Article
ISSN: 0026-2692
DOI: 10.1016/0026-2692(95)00046-1

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