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Fabrication of microstructured optical elements for visible light by means of LIGA-technology

✍ Scribed by B.G. Goldenberg; V.F. Pindyurin; U.V. Ancharova; V.S. Eliseev; E.V. Petrova; V.P. Korolkov; R.K. Nasyrov; N.Y. Nikanorov

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 240 KB
Volume: 603
Category: Article
ISSN: 0168-9002
DOI: 10.1016/j.nima.2008.12.147

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✦ Synopsis

Application of X-ray lithography for fabrication medium-size (units-10 mm) microstructures with 3D-continuous-relief for optical needs is discussed. The method of production LIGA-masks without temporal masks is described. Also processing and preliminary results are presented.

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