✦ LIBER ✦
Fabrication of 128×128 element optical switch array by micromachining technology
✍ Scribed by S.B. Wang; S.B. Zhou; G. Huang; B.F. Xiong; S.H. Chen; X.J. Yi
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 211 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0026-2692
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✦ Synopsis
Polycrystalline VO 2 thin films were obtained on Si substrates by ion beam sputtering deposition and annealing in flowing Ar gas. SEM images indicate that VO 2 thin films were grown into compact surfaces. Four-probe measurements indicated that the VO 2 thin films own good electrical homogeneity. After the films' production, micromachining technology including lithography, reaction ion etching and metallization connection processes was used to produce the optical switch array. As a result, the 128!128 element optical switch array was achieved.