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Fabrication of micro-trench structures with high aspect ratio based on DRIE process for MEMS device applications

✍ Scribed by Maoxiang Guo, Xiujian Chou, Jiliang Mu, Bing Liu, Jijun Xiong

Book ID: 120914881
Publisher: Springer-Verlag
Year: 2013
Tongue: English
Weight: 789 KB
Volume: 19
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-012-1720-9

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