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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Fabrication of sharp tips with high aspect ratio by surfactant-modified wet etching for the AFM probe

✍ Scribed by Tang, B.; Sato, K.; Tanaka, H.; Gosalvez, M. A.

Book ID: 121294101
Publisher: IEEE
Year: 2011
Weight: 887 KB
Category: Article
ISBN: 1424496322
DOI: 10.1109/MEMSYS.2011.5734428

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