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Fabrication of magnetic microstructures by using thick layer resists

✍ Scribed by B. Löchel; A. Maciossek; M. König; H.-L. Huber; G. Bauer

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 532 KB
Volume: 21
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90111-h

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