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Fabrication of Lateral Porous Silicon Membranes for Planar Microfluidic Devices

✍ Scribed by Dubosc, Fabrice; Bourrier, David; Leichlé, Thierry

Book ID: 123098908
Publisher: Elsevier
Year: 2012
Tongue: English
Weight: 487 KB
Volume: 47
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.268

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