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Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth

✍ Scribed by Mårtensson, T; Borgström, M; Seifert, W; Ohlsson, B J; Samuelson, L

Book ID
120882895
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
303 KB
Volume
14
Category
Article
ISSN
0957-4484

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Germanium nanowires with diameters from 10 to 70 nm and lengths up to 3 mm have been grown by Vapour-Liquid-Solid Molecular Beam Epitaxy (VLS MBE) on Ge (1 1 1), Si (0 0 1) and Si (1 1 0) substrates. The growth of nanowires was induced by gold droplets. We show that substrate temperature and germani