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Fabrication of high precision microstructure using ICP etching for capacitive inclination sensor

✍ Scribed by Daiji Noda, Yuu Kuboyama, Tadashi Hattori

Book ID: 120914822
Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 599 KB
Volume: 19
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-012-1548-3

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