✦ LIBER ✦
Fabrication of high-speed polyimide-based humidity sensor using anisotropic and isotropic etching with ICP
✍ Scribed by Jae Sung Kim; Myung Jin Lee; Moon-Sik Kang; Kum-Pyo Yoo; Kwang-Ho Kwon; V.R. Singh; Nam Ki Min
- Book ID
- 108290384
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 1008 KB
- Volume
- 517
- Category
- Article
- ISSN
- 0040-6090
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