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Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors

✍ Scribed by Dr. Olivier J. A. Schueller; Dr. Scott T. Brittain; Prof. George M. Whitesides

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 327 KB
Volume: 9
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.19970090604

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✦ Synopsis

Communications

formed with this method is limited by the resolution of the microcontact printing (-0.2 pm)J2] by the ability to set the angle and position of the stamp relative to the object to be patterned (-0.01", and -2 Fm for our apparatus))'] and by uncertainties in the dimensions of the curved support. The composition of these parts is limited to materials that can be electrodeposited. We believe that our method offers a simple means for fabrication of complex three-dimensional microstructures that will be a valuable complement to other means for microfabrication. Many applications in biotechnology and MEMS should be found.

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